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Energy Dispersive Spectroscopy
Energy Dispersive Spectroscopy
(EDS) is an accessory on most scanning electron
microscopes (SEM). When the SEM electron beam strikes the
surface of the sample, the electron beam energizes
the surface atoms and x-rays result from that
interaction. The energy of those x-rays is unique
and specific to the chemical species (atom) from
which they initiated. These characteristic x-ray
energies are collected and displayed as a spectra or
chemical fingerprint of the sample area under
examination. The spectra (or x-ray energy spectra)
results can be used to determine a semi-quantitative
analysis of “what is on the surface” and
“approximately how much is present”. An EDS spectra
is shown in the figure below.
Cases
involving Energy Dispersive Spectroscopy (EDS):
Corrosion Failure
Analysis
Clevis Pin Failure
Motor Cooling Fan
Failure
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