Education/Definitions

Energy Dispersive Spectroscopy

Energy Dispersive Spectroscopy (EDS) is an accessory on most scanning electron microscopes (SEM). When the SEM electron beam strikes the surface of the sample, the electron beam energizes the surface atoms and x-rays result from that interaction. The energy of those x-rays is unique and specific to the chemical species (atom) from which they initiated. These characteristic x-ray energies are collected and displayed as a spectra or chemical fingerprint of the sample area under examination. The spectra (or x-ray energy spectra) results can be used to determine a semi-quantitative analysis of “what is on the surface” and “approximately how much is present”. An EDS spectra is shown in the figure below.

Example EDS

 

Cases involving Energy Dispersive Spectroscopy (EDS):
Corrosion Failure Analysis
Clevis Pin Failure
Motor Cooling Fan Failure

 


Updated 5/17/10